Residual Gas Analysis & Cleanliness Qualification
Residual gas analysis and outgassing assessment for vacuum applications, plus particle measurements for cleanrooms and cleanroom applications.
Stringent requirements for system cleanliness and the lowest possible outgassing of installed components are essential for many vacuum applications. We offer both cleanliness qualification of your vacuum components using residual gas analysis (RGA) and the determination of outgassing rates for individual components or new materials.
In addition, we support you with our experience in selecting vacuum-compatible materials for your specific application.
For cleanliness qualification of your cleanrooms or cleanroom applications, we offer measurement of airborne particles as well as particle emissions during operation. For measurement and analysis of chemical contamination sources, we work with external partners.
Our Focus Areas
Residual gas analysis in vacuum
RGA supports the assessment of vacuum components, outgassing behavior, and material-related contamination risks.
Particle measurements
For cleanrooms, systems, and active processes, we measure airborne particles as well as particle emissions during operation.
Material and specialist analytics
We advise on vacuum-compatible material selection and involve specialist partners for chemical contamination analysis.
Cleanliness Qualification for Vacuum and Cleanroom Applications
For vacuum applications, the focus is on residual gas analysis, outgassing rate determination, and assessment of vacuum-compatible materials. For cleanrooms and cleanroom applications, we complement this with particle measurements and evaluation of particle emissions during operation.
Typical Testing and Consulting Scope
Discuss residual gas analysis
We support you with material evaluation, sampling, and the selection of suitable test methods.
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